8500 Series
- The high-lift actuator allows this compact model to control a large flow rate
- Equipped with a display and setting unit
- The RS232C/RS485 communication function and integration function are provided as standard equipment.
- Control of the flow rate of inflammable gas is possible
3100 Series
- Equipped with a temperature follow-up type current difference detection flow sensor to ensure high accuracy and quick response
- Measurements of minute flows available up to 1 sccm full scale (SR option)
